What is a vacuum?
Vacuum stems from the Latin adjective vacuus for "empty", but in fact, it is impossible to achieve a state of no particles at all in vessel. A realistic vacuum can be created by removing air from a vessel using a vacuum pump. The quality of a vacuum refers to the remaining amount of air.
Main purpose of vacuum pump is to decrease air density in vessel, and the lower the density is, it gets easier to become high vacuum. There are many different types of vacuum pump such as rotary type, diffusion type and turbine type, and they are installed according to the degree of vacuum.
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The degree of vacuum |
The degree of vacuum |
Pressure |
Low Vaccum |
760 Torr ~ 1 Torr |
100 kPa ~ 100 Pa |
Middle Vaccum |
1 Torr ~ 10-3 Torr |
100 Pa ~ 0.1 Pa |
High Vaccum |
10-4 Torr ~ 10-7 Torr |
0.1 Pa ~ 10 uPa |
Ultra High Vaccum |
Below 10-8 Torr |
Below 10 uPa |
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Benefits of vacuum state |
• Prevent corrosion and oxidation comes from air and gas.
• Lower boiling point to accelerate evaporation.
• The use of vacuum pad facilitates transportation of objects which are hard to transport by other devices.
• After remove air from vessel, you can put another gas into vessel.
• Improve electrical properties. |
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Industrial applications |
Industries |
Application |
Nuclear energy industry |
Gas Pressure Test, Nuclear fusion(plasma),Radiation detector |
Construction industry |
Concrete dehydration, Powder coating |
Food industry |
Drying, Distillation, Enrichment, Degassing, Vacuum packing, Freeze drying |
Chemical/medicine industry |
Vitamin, Fat, Oil, Degassing, Deodorization, Dehydration |
Car industry |
Heat treatment, Quenching, Vacuum Deposition for lenses, Sputtering, Component, robot, Air conditioner |
Electronic industry |
Magnetron, picture tube, semiconductor, LSI, Optical IC, vacuum evaporation, CVD, LCVD, material analysis |
Optical industry |
Spectrometer, copier, Hot stage microscope, |
Metal industry |
Distillation, degassing, Sintering, Quenching, Annealing, Casting, Dissolution, Electron beam |
physical & chemical
Industry |
Electron microscope, Surface analyzer, Mass spectrometer, Particle accelerator |
Others |
Low temperature industry, Electrical wire, Space development, Energy development, medical devices, Craft evaporation, Household appliances, Molding, Printing, Industrial machine |
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